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Master Tools for Embossing

We manufacture masters for hot embossing for the mass production microfluidic components from materials like PMMA and Topas®. Masters consist of silicon that is anisotropically etched in SF6-O2 plasma (advanced silicon etching, ASE) and then coated by a Teflon-like material. GeSiM has optimized the ASE procedure with respect to wall angle and smoothness, and in conjunction with the Teflon-coating master tools are produced that can be easily demolded.

GeSiM can also provide rapid-prototyping tools simply made from microstructured photoresist.  

Master structure, just 3 microns high.		Master with a structure height of 200 microns. The wall angle is convenient for demolding and the roughness is very low.		Silicon master